The ATM was taken from Barry Road in Carnoustie, Angus, at around 4.30am on Friday.
Police Scotland said five men have been charged and were expected to appear at Forfar Sheriff Court on Monday.
They are aged 26, 27, 28, 32 and 43 and are from the Liverpool and Birmingham areas, officers confirmed.
It follows an operation on Friday in which the men were detained and police used shotguns to burst the tyres of a vehicle believed to have been involved in the raid.
The incident at Westway Retail Park, Arbroath, is being referred to the Police Investigations and Review Commissioner (PIRC) in line with procedures around firearms incidents.